Figure 3. The Raman spectra of Cu3N films prepared by
magnetron sputtering at different RF power and the working pressures of
3.5 Pa and 5.0 Pa.
The surface of the samples was analysed by AFM. The scanning area was
1x1μm2. Figure 4 shows the surface roughness obtained
from the root-mean-square (rms) as function of the RF power. As it can
be observed, the higher the rms value, the rougher the surface of the
thin film. It was also observed that the smoothest films with
close-grained surface morphology were the surface of the samples made at
5.0 Pa and lower RF power values.